JPH0422253Y2 - - Google Patents
Info
- Publication number
- JPH0422253Y2 JPH0422253Y2 JP7154786U JP7154786U JPH0422253Y2 JP H0422253 Y2 JPH0422253 Y2 JP H0422253Y2 JP 7154786 U JP7154786 U JP 7154786U JP 7154786 U JP7154786 U JP 7154786U JP H0422253 Y2 JPH0422253 Y2 JP H0422253Y2
- Authority
- JP
- Japan
- Prior art keywords
- base
- axis direction
- stage
- axis
- bellows
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000001105 regulatory effect Effects 0.000 claims description 25
- 238000006073 displacement reaction Methods 0.000 claims description 14
- 230000007246 mechanism Effects 0.000 description 11
- 238000005259 measurement Methods 0.000 description 8
- 238000001514 detection method Methods 0.000 description 7
- 230000002265 prevention Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 239000000523 sample Substances 0.000 description 2
- 239000000470 constituent Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7154786U JPH0422253Y2 (en]) | 1986-05-12 | 1986-05-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7154786U JPH0422253Y2 (en]) | 1986-05-12 | 1986-05-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62182409U JPS62182409U (en]) | 1987-11-19 |
| JPH0422253Y2 true JPH0422253Y2 (en]) | 1992-05-21 |
Family
ID=30914198
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7154786U Expired JPH0422253Y2 (en]) | 1986-05-12 | 1986-05-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0422253Y2 (en]) |
-
1986
- 1986-05-12 JP JP7154786U patent/JPH0422253Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62182409U (en]) | 1987-11-19 |
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